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For gate oxide thickness measurements, Avantage 24 includes a thickness calculator that uses the modified Beer-Lambert law. It can calculate SiO2 thickness on Si with precision down to 0.2 nm.
: A built-in library of XPS spectra and chemical state information that assists in the interpretation of complex peaks [3]. Thermo Avantage Xps Software 24
: Integrates data from UPS (Ultraviolet Photoelectron Spectroscopy), REELS, and ISS within a single interface. Automated Charge Compensation For gate oxide thickness measurements, Avantage 24 includes
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